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Aligned Carbon Nanotube Arrays
Aligned carbon nanotube arrays are synthesized in a chemical vapor deposition (CVD) system. NanoLab has two types of CVD systems for aligned growth; Plasma Enhanced CVD, and thermal-CVD. These differ significantly in their properties.
Features  PECVD   Thermal CVD
Diameter, nm 30-150 5-10
Length, microns 1-20 50-300
Rigidity Freestanding (bed of nails) mutually supported
Site Density CNT/cm2 10^5 to 10^9 >10^9
Substrates Si, SiO2, W, Mo, SS, C Si, SiO2
Adhesion Layer Ti or Cr, 100nm Al2O3
Catalyst Nickel Iron
Size up to 2" square 1" square
Patterns Yes, lithographic Yes, lithographic
Uses field emission devices, sensors, electrostatically actuated devices, etc supercapacitors, electrodes, optical coatings, etc.

PECVD Details: For PECVD arrays, the substrate (metal, glass, silicon, etc) are first coated with an adhesion layer (titanium or chromium), and then overcoated with nickel nanoparticles, then introduced to the CVD chamber. The method of nickel nanoparticle deposition defines the nanotube site density. Standard aligned carbon nanotube forests are produced from a sputtered nickel catalyst film on the substrate, whereas low site-density carbon nanotube arrays are produced by electrodeposition of the nickel catalyst onto the substrate.
In the PECVD system, the carbon nanotubes grow vertically from the substrate surface, and are freestanding. The length is related to the process time, but the diameter depends primarily on the nickel particle size.

In structure, PECVD aligned carbon nanotubes have multilayer graphitic sidewalls and hollow core ( Fig. 1). The graphitic sidewalls contain bamboo structures (Fig. 2). All nanotube tips are capped with a single nickel nanoparticle, a result of a tip-growth mechanism of aligned carbon nanotubes (Fig. 3).

Thermal CVD Details: In TCVD arrays, the nanotubes are much smaller in diameter, and can grow to extreme lengths. These are not self-supporting, and the alignment is due to crowding of neighboring nanotubes. These are catalyzed by an iron layer, typically deposited atop an alumina adhesion layer. These arrays have huge surface area and can be drawn into sheets or wires.

NanoLab offers a wide variety of aligned carbon nanotube arrays. We can tailor a carbon nanotube array to your specifications, including complex patterning on many types of substrates using microscale and nanoscale lithography. Please allow three week delivery for standard orders.
phone (781) 609 2722 ext.4#     fax(781) 609 2899     email an Array Specialist to ask questions.
Thermal CVD Aligned Arrays images
  • Carbon nanotube diameter: 10-30 nm
• Carbon nanotube length: 50-300 microns.
• Carbon nanotube site density: 1011 nanotubes/cm2.
• Substrate material: Silicon
Plasma Enhanced CVD Aligned Arrays
  Standard PECVD Aligned Carbon Nanotube Arrays: images     Check stock items
View substrate materials and/or place an order -- HTML
Data Sheets for PECVD Aligned Carbon Nanotube Arrays -- PDF
• Nanotube length: Specify 1-20 microns, and allow a tolerance of ± 10%
• Nanotube diameter: Specify between 30 & 150 nm, and allow a tolerance of ± 30%
• CNT site density: 1~2x109nanotubes/cm2

Low Site Density Aligned PECVD CNT Arrays: images    Check stock items
View substrate materials and/or place an order -- HTML
• Nanotube length: 1-5 microns
• Nanotube diameter: 50-150 nm
• Nanotube site density: 105~107 nanotubes/cm2

Metal-Decorated Aligned CNT Arrays: images
• Various of metals available to decorate standard carbon nanotube arrays and low site density carbon nanotube arrays, such as TiW, HfC, Cu, Ti, Ag, Au, etc. For more metals, please email array specialist,zhongping@nano-lab.com

Polymer-sealed CNT Arrays:
† CNT arrays sealed with spin-on glass images
• Sealing thickness: 1-3 microns.
† CNT arrays sealed with PDMS images
• Sealing thickness 5-20 microns.

Custom Aligned Carbon Nanotube Arrays:
• Other sizes, up to 2 inches diameter
• Different substrate materials
• Complex patterns and designs. images

PECVD-MWCNT Suspensions
• Click Aligned carbon nanotube suspensions to go to our suspension page.
The page was updated on 11/01/2011